La polvere di carburo di silicio (SiC) verde utilizzata nella lucidatura dei wafer semiconduttori è un materiale chiave. È ampiamente utilizzata nei processi di lucidatura di precisione grazie alla sua elevata durezza, all’eccellente stabilità chimica e alla stabilità termica.
1. Caratteristiche del carburo di silicio verde
—Elevata durezza (durezza Mohs 9,2): seconda solo al diamante e al nitruro di boro cubico, adatta alla lavorazione di materiali duri (come silicio, wafer di carburo di silicio).
—Inerzia chimica: non reagisce con acidi e alcali a temperatura ambiente per evitare la contaminazione della superficie del wafer.
—Stabilità termica: mantiene le prestazioni anche ad alte temperature, adatto per lucidatura ad alta velocità.
–Forma affilata delle particelle: garantisce un’efficace capacità di taglio, ma è necessario controllare l’uniformità delle particelle per evitare graffi.
| ANALISI CHIMICA TIPICA | |
| Silicio | ≥99,05% |
| SiO2 | ≤0,20% |
| F,Si | ≤0,03% |
| Fe2O3 | ≤0,10% |
| FC | ≤0,04% |
| PROPRIETÀ FISICHE TIPICHE | |
| Durezza: | Mohs: 9,5 |
| Punto di fusione: | Sublima a 2600 ℃ |
| Temperatura massima di servizio: | 1900℃ |
| Peso specifico: | 3,20-3,25 g/cm3 |
| Densità apparente (LPD): | 1,2-1,6 g/cm3 |
| Colore: | Verde |
| Forma delle particelle: | Esagonale |
2. Applicazione nella lucidatura dei semiconduttori
—Fase di lucidatura grossolana: utilizzata per rimuovere difetti più grandi o tracce di lavorazione sulla superficie del wafer (ad esempio strati danneggiati dopo il taglio e la macinazione).
—Lucidatura di wafer in carburo di silicio (SiC): il carburo di silicio verde ha la stessa durezza dei materiali dei wafer in SiC per ridurre i danni superficiali.
—Applicazioni ausiliarie: utilizzato per lucidare materiali duri e fragili come substrati di zaffiro e vetro ottico.
3. Requisiti di qualità chiave
—Distribuzione granulometrica: deve essere altamente uniforme (ad esempio D50 1–5μm) per evitare graffi causati da particelle di grandi dimensioni.
—Purezza: elevata purezza (≥99,9%) per ridurre la contaminazione da impurità metalliche (come Fe, Al).
—Morfologia delle particelle: deve essere sferica o equisuperficiale per ridurre la rugosità superficiale.
—Sospensione: dispersione stabile nel liquido lucidante per evitare la sedimentazione.
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